Tactile sensor solution with MEMS press...

Abstract Tactile sensing is essential for any haptic

interaction of robots and robotic systems with their

environments. Throughout this work we introduce a

tactile sensing solution based on a MEMS pressure

sensor consisting of an array of flexible sensor cells,

which enables spatially resolving force and contact

pressure measurements over a wide dynamic range

at high resolution. A compelling feature of the devel-

oped sensor concept is its soft and “human-like” me-

chanical touch behavior, which can solve challenges

regarding the handling of sensitive objects, human-

like tactile perception in prosthetics, or human-robot

interaction scenarios. The developed sensor solution

is characterized and evaluated in a typical collabora-

tive robot work scenario in the industry for the grip-

ping and lifting of objects with a commercial indus-

trial robot system.