Publication: Sampling Decision System in semiconduct...
Master data
| Title: | Sampling Decision System in semiconductor manufacturing using Virtual Metrology |
| Subtitle: | |
| Abstract: | |
| Keywords: |
| Publication type: | Article in compilation (Authorship) |
| Publication date: | 01.2013 (Print) |
| Published by: |
Proceedings CASE 2012
Proceedings CASE 2012
(
IEEE;
Proceedings of IEEE Conference on Automation Science and Engineering (CASE) 2012
)
to publication |
| Title of the series: | - |
| Volume number: | - |
| First publication: | Yes |
| Version: | - |
| Page: | pp. 74 - 79 |
Versionen
| Keine Version vorhanden |
| Publication date: | |
| ISBN (e-book): | - |
| eISSN: | - |
| DOI: | http://dx.doi.org/10.1109/CoASE.2012.6386366 |
| Homepage: | - |
| Open access |
|
| Publication date: | 01.2013 |
| ISBN: | - |
| ISSN: | 2161-8070 |
| Homepage: | http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6386366&isnumber=6386304 |
Assignment
| Organisation | Address | ||
|---|---|---|---|
|
Fakultät für Technische Wissenschaften
Institut für Statistik
|
AT - 9020 Klagenfurt am Wörthersee |
Categorisation
| Subject areas | |
| Research Cluster | No research Research Cluster selected |
| Peer reviewed |
|
| Publication focus |
Classification raster of the assigned organisational units:
|
| working groups | No working group selected |
Cooperations
No partner organisations selected
Research activities
All related research activities to this publication are shown here. With the link below, you can view them in the search view where you are also able to export them.
Show related search activities in search
| Projects: | No related projects |
| Publications: | No related publications |
| Events: | No related events |
| Lectures: | No related lectures |
Articles of the publication
No related publications